HARRICK PLASMA
해릭플라즈마 플라즈마 클리너 표면처리기
BASIC PLASMA CLEANER
PDC-32G-2
Basic Plasma Cleaner 는 소형이면서도 경제적인 테이블탑 플라즈마 장비로, 힌지형 도어, 관찰용 창, 정밀 가스 조절 밸브를 갖추고 있어 나노 스케일 표면 세정 및 소형 샘플의 활성화에 적합합니다.
- 가장 작은 사이즈, 탁상형모델
- 조절 가능한 RF 출력 설정
(Low, Medium, High)
- RF 파워 최고출력 : 18W
- 챔버사이즈 : 3"(7.6cm)x 6.5"(16.5cm)인치
길이의 Pyrex 챔버 포함
- 고정형 도어, 윈도우가 장착된 커버
- 팬쿨러를 사용한 냉각 시스템
- 1/8" NPT metering 밸브로 다양한 가스 주입 및 세밀한 유량 컨트롤이 가능
(PLASMAFLO 악세서리 구입시)
- 1/8″ NPT 3-way 밸브를 통한 가스 주입, 배출 및 챔버 격리 간 빠른 전환
- 사이즈: 8.5"H(21.6cm) x 10"W(25.4cm) x
8"D (20.3cm)
- 무게 : 13lbs (약 5.9kg)
옵션 사항
🔹 PlasmaFlo 가스 믹서를 추가하면 최대 두 가지 공정 가스의 정량적 제어 및 진공 압력 모니터링 가능
🔹 쿼츠 챔버 및 샘플 트레이 옵션 제공
🔹 호환 가능한 진공 펌프 제공
필수 요구 사항
▶ 최소 1.4 m³/hr (23 L/min) 이상의 펌핑 속도와 200 mTorr (0.27 mbar) 이하의 궁극적 총 압력을 갖춘 진공 펌프 필요
▶ 비반응성 가스 (공기, N₂, Ar) 사용 시 표준 진공 펌프(Standard Vacuum Pumps) 사용 가능
▶ 고농도 또는 순수 산소(O₂) 사용 시 산소 전용 펌프(Oxygen Service Pumps) 사용 필요
What is Plasma?
Plasma, the fourth state of matter, is a distinct processing medium for surface treatment and surface modification. This note discusses the nature of plasma and how plasma is formed, its unique advantages, and the types of surface interactions that are possible during plasma treatment.
견적 요청 및 문의
Poly(dimethylsiloxane) (PDMS) is a silcone-based organic polymer used extensively in professional and academic research laboratories for its low cost and high versatility. PDMS is inert, transparent and easily customized via soft lithography, a technique used to mold PDMS and imprint nano-scale features and microchannels into its surface. Harrick Plasma Cleaners remove organic contamination and activate the PDMS surface in preparation for bonding with glass, PDMS or other similarly treated surfaces. PDMS bonding is most commonly used in the development of microfludic devices. For references citing the use of our plasma cleaners in microfluidic applications, see the Microfluidic Devices category in our Technical Library.
SURFACE HYDROPHILICITY
Plasma treatment introduces polar functional groups that increase the wettability of a substrate. Increased surface wettability enhances fluid flow within microfludic devices and improves PDMS biocompatability.
Immediately following plasma treatment, the PDMS surface begins to undergo hydrophobic recovery as the high energy surface reconfigures towards a lower energy state. It is recommended that PDMS bonding and other subsequent processing steps be performed within 15 minutes to an hour of plasma treatment.
Additionally, alternating hydrophilic-hydrophobic regions may be patterned on microfluidic surfaces by plasma treating devices through a patterned mask.
PROCESSING METHODS
Below are suggested process conditions for plasma activation of PDMS-PDMS or PDMS-glass in a Harrick Plasma cleaner (some experimentation may be required to determine optimal process conditions):
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Use oxygen (O2) or room air as the process gas
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Pressure: 200 mTorr to 1 Torr
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RF power: Typically HIGH
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Process time: 15-60 seconds
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As is the case with experimental processes and fabrication techniques, plasma process conditions reported by users have varied widely, even when plasma treating similar PDMS materials.
ADDITIONAL PROCESS CONSIDERATIONS
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After Plasma Treatment, press and hold PDMS components together lightly for 30 sesonds. Do not pull apart and adjust alignment as this will disrupt bond formation. Pressing with too much force may collapse microfluidic channels.
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Heat the assembled device at 80-100 degrees Celsius for 60 seconds in an oven or hot plate. The high temperature provides activation energy for additional bond formation.
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Cleanliness: the presence of particulates or oil can block bonds from forming. Avoid touching the surfaces to be bonded when removing PDMS from the plasma chamber
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Surface Roughness: Smooth surfaces maximize contatct between bonding materials, providing more opportunity for siloxane bond formation. Adjust your soft lithography process to ensure smooth substrates.
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Air vs Oxygen: Oxygen is more efficient than air due to the higher concentration of reactive oxygen species. Additionally, air from an environment prone to daily fluctuations in humidity or particulates can adversly affect PDMS bonding.
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Plasma treatment should not exceed 2 min, as prolonged plasma exposure causes cracking in PDMS and migration of low molecular mass molecules from bulk to surface, decreasing the number of hydrophilic SiOH groups and resulting in weak or incomplete bonding
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Oxidized surfaces should be brought into contact immediately after plasma treatment to achieve strongest bond possible
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PDMS surface recovers hydrophobic properties (aging) with time after plasma treatment (~1 hour).